Inspection Service for Delivered Equipment
Aiming for stable operation of existing installations
- Prevention of malfunctions and troubles
- Quality stabilization of substrates production
- Proposals for replacing friction parts
- Proposals for upgrading equipment performance
Examples of issues identified during inspection services
- Conveyance system:Wear of chains, sprockets, gears, etc.
- Spray system:Friction in the oscillation drive unit, spray pipe leakage
- Enclosure system:Main body leakage, lid leakage, abnormal noise from the pump
- Electrical system:Preventive maintenance (PM) management of electrical contact corrosion
Examples of equipment upgrade proposals
- Improvements for thin material conveyance (substrate thickness of 100µm, 60µm, 25µm)
- Enhancement of etching precision, improvements using eminent method and super oscillation
- Unit replacement updates aimed at improving yield
- Maintenance and function improvement consultations for equipment from other manufacturers
Would you like to upgrade your performance with a renewal!?
Renewal Case (Example from domestic company A)
After reviewing the nozzle arrangement for etching...
Before renewal
Top side of the substrate
| R(Max-Mln) | 13.8 | Etch Rate(sec/µm) | 2.6 |
|---|---|---|---|
| R/2X (%) | 21.8 | Standard deviation(µm) | 3.7 |
Bottom side of the substrate
| R(Max-Mln) | 10.6 | Etch Rate(sec/µm) | 2.1 |
|---|---|---|---|
| R/2X (%) | 13.7 | Standard deviation(µm) | 2.0 |
After renewal
Top side of the substrate
| R(Max-Mln) | 6.3 | Etch Rate(sec/µm) | 2.4 |
|---|---|---|---|
| R/2X (%) | 8.6 | Standard deviation(µm) | 1.3 |
Bottom side of the substrate
| R(Max-Mln) | 3.6 | Etch Rate(sec/µm) | 2.0 |
|---|---|---|---|
| R/2X (%) | 4.1 | Standard deviation(µm) | 0.6 |
Further quality improvement would be expected by adopting the Eminent method and super oscillation technology.
Please note that specifications are subject to change for improvements.